专利名称：Capacitive acceleration sensor
发明人：SCHUSTER, GUENTHER, DR.,NOTHELFER,
UDO
申请号：EP95116081.1申请日：19951012公开号：EP0710843B1公开日：19970416
摘要：The sensor (10) has a planar structure and has a movable cantilevered structure(2) arranged in a hollow space (13), which varies the capacitance. The sensor is formedfrom two semiconductor bodies (1a,1b), which have different recess types which form thehollow space when the bodies are connected to each other. The cantilevered structure isarranged in one of the recesses and is connected to the semiconductor body (1b) bearingthat particular recess such that the structure can move freely perpendicular to thesurface of both semiconductor bodies. The semiconductor bodies are connected via athermally grown oxide layer (4).
申请人：TEMIC TELEFUNKEN MICROELECTRONIC GMBH,TELEFUNKENMICROELECTRON,TEMIC TELEFUNKEN MICROELECTRONIC GMBH
地址：DE
国籍：DE
代理机构：Maute, Hans-Jürgen, Dipl.-Ing.
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