Apparatus for drying cleaned workpieces

专利名称：Apparatus for drying cleaned workpieces发明人：Yoshihide Shibano申请号：US08/151025申请日：19931112公开号：US05423131A公开日：19950613

摘要：Plate-like workpieces such as thin ceramic plates which are ultrasonicallycleaned are housed in a tray having an air-permeable bottom plate and a plurality of air-impermeable sidewall plates extending from peripheral edges of the bottom plate. Todry the cleaned workpieces, the tray is placed in a drying tank and supported on asupport base on the bottom of the drying tank at an inclined attitude. The drying tank iscombined with a hot-air duct which is detachably coupled to respective edges of thesidewall plates of the tray when the tray is supported on the support base. The hot-airduct supplies hot air into an interior space of the tray which is surrounded by the sidewallplates. A suction duct is coupled to the bottom plate of the tray supported on thesupport base and draws hot air supplied from the hot-air duct from within the interiorspace through the bottom plate.

申请人：SHIBANO; YOSHIHIDE

代理人：Paul A. Guss

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