Optical characteristic measuring apparatus and opt

专利名称：Optical characteristic measuring apparatus

and optical characteristic measuring method

发明人：Yusuke Yamazaki,Sota Okamoto申请号：US13548210申请日：20120713公开号：US08582124B2公开日：20131112

专利附图：

摘要：An optical characteristic measuring apparatus includes a light source, a detectorand a data processing unit. Data processing unit includes a modeling unit, an analyzingunit and a fitting unit. The plurality of film model equations are solved, and prescribed

calculation is performed on the assumption that the optical constants included in theplurality of film model equations is identical. Fitting is performed between a waveformobtained by substituting the obtained film thickness and the obtained optical constantsof the film into the film model equations and a waveform of the wavelength distributioncharacteristic obtained by detector, thereby determining that the optical constantsincluded in the plurality of film model equations is identical and that the film thicknessand the optical constants obtained by the analyzing unit are correct values.

申请人：Yusuke Yamazaki,Sota Okamoto

地址：Koka JP,Hachioji JP

国籍：JP,JP

代理机构：Ditthavong Mori & Steiner, P.C.

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