专利名称：Acoustic wave flow sensor for high-condensation applications
发明人：James Z T Liu,Stephen C. Carlson,Steven J.
Magee
申请号：US11145625申请日：20050603公开号：US07373838B2公开日：20080520
专利附图：
摘要：An acoustic wave flow sensor includes a piezoelectric substrate and a heaterlocated immediately below the acoustic wave substrate. A heating element can be
deposited in association with a plurality of acoustic wave components upon the acousticwave substrate. The acoustic wave components, the piezoelectric substrate, the heaterand the heating element operate in a high-condensation environment, such that theplurality of acoustic wave components are heated directly by the heater and/or theheating element, thereby promoting a desorption of water in the high-condensationenvironment in order to achieve accurate and reliable flow sensing data thereof.
申请人：James Z T Liu,Stephen C. Carlson,Steven J. Magee
地址：Belvidere IL US,Roscoe IL US,Lena IL US
国籍：US,US,US
代理人：Kermit D. Lopez,Luis M. Ortiz
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