专利名称：Method for measuring current distribution
in an integrated circuit by detectingmagneto-optic polarization rotation in anadjacent magneto- optic film
发明人：Mark Russel Freeman申请号：US08/481667申请日：19950607公开号：US05663652A公开日：19970902
摘要：An apparatus and method for measuring the current distribution in anintegrated circuit with high time resolution is described incorporating a magneto-opticfilm, a linearly polarized light beam and a means for measuring the magneto-opticpolarization rotation of a light beam and circuitry for synchronizing test pulses in anintegrated circuit. The invention overcomes the problem of determining currentdistribution as a function of time and location in an integrated circuit with 1 psec timeresolution and 1 micrometer spatial resolution.
申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION
代理人：Robert M. Trepp,Ronald L. Drumheller
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