专利名称：Silicon base plate with low parasitic electrical
interference for sensors
发明人：Tony K. Tang,Roman C. Gutierrez申请号：US09612327申请日：20000706公开号：US06405594B1公开日：20020618
专利附图：
摘要：A microgyroscope has a baseplate made of the same material as the rest of themicrogyroscope. The baseplate is a silicon baseplate having a heavily p-doped epilayercovered by a thick dielectric film and metal electrodes. The metal electrodes are isolated
from the ground plane by the dielectric. This provides very low parasitic capacitivecoupling between the electrodes. The thick dielectric reduces the capacitance betweenthe electrodes and the ground plane.
申请人：CALIFORNIA INSTITUTE OF TECHNOLOGY
代理机构：Fish & Richardson P.C.
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